Wopanga Mapulogalamu

Table ya Parameter

Mafotokozedwe Akatundu

M'magawo ophatikizika ndi kupanga gulu lowonetsera, "chitukuko" nthawi zambiri chimatanthawuza gawo la njira ya Photolithography yomwe imagwiritsidwa ntchito pochotsa photoresist m'malo osawonekera. Njirayi ndi yofunika kwambiri popanga zinthu chifukwa imatanthawuza ndondomeko ndi ndondomeko ya zinthu, zomwe zimakhudza momwe chipangizocho chimagwirira ntchito. Mu ndondomeko ya photolithography, njira yomwe ikukula imagwiritsidwa ntchito pokonza photoresist yophimba chip pamwamba ndikuchotsa photoresist m'madera osadziwika.

Kugwiritsiridwa ntchito kwapadera nthawi zambiri kumakhala ndi zotsatirazi:
Kukonzekera:Musanayambe kupanga, muyenera kukonzekera zida zomwe zikukula ndikupanga njira yothetsera. Njira yothetsera vutoli nthawi zambiri imakhala mankhwala apadera omwe amasungunula photoresist m'madera osadziwika.
Kumira:Chip chophimbidwa ndi photoresist chimanyowa mu njira yomwe ikukula. Nthawi yowuka ndi kutentha nthawi zambiri zimayenera kuyendetsedwa kuti zitsimikizire kuti photoresist imachotsedwa bwino.
Kuchapa:Kukonzekera kukamalizidwa, chip nthawi zambiri chimafunika kutsukidwa kuti chichotse zotsalira zotsalira ndi zonyansa zina.
Kuyanika:Pomaliza, chip chiyenera kuumitsidwa kuonetsetsa kuti pamwamba pake ndi youma komanso yopanda zotsalira.

Popanga gulu lowonetsera, njira zofananira zachitukuko zitha kugwiritsidwanso ntchito kuchotsa zida zina kapena zophatikiza kuti zipange mawonekedwe kapena mawonekedwe a gulu lowonetsera. Ndikoyenera kudziwa kuti njira yachitukuko imafuna kuwongolera kokhazikika kwa magawo owongolera ndi nthawi kuti zitsimikizire kuti zomwe zimatsatira ndi zomanga zimakwaniritsa zofunikira zamapangidwe komanso kulondola kopanga. Kuphatikiza apo, muzopanga zilizonse, kugwiritsa ntchito mankhwala kumafunikira kutsata njira zotetezeka zogwirira ntchito komanso zofunikira zoteteza chilengedwe.

Madivelopa amagwiritsidwa ntchito makamaka mu njira ya photolithography mumakampani a semiconductor. Njira ya Photolithography ndi sitepe yofunika kwambiri pakupanga semiconductor, yomwe imagwiritsidwa ntchito kufotokozera ting'onoting'ono tating'onoting'ono ndi kapangidwe ka silicon wafers pa chip. Mu ndondomeko ya photolithography, photoresist imakutidwa pamwamba pa kachitsulo kakang'ono ka silicon, ndiyeno chitsanzocho chimasamutsidwa ku photoresist pogwiritsa ntchito chigoba ndi kuwunikira kuwala kwa UV. Kenako, woyambitsa amabwera pa siteji. Ntchito ya wopanga ndi kusungunula kapena kuchotsa gawo la photoresist lomwe silinakhalepo photolithographed, potero posamutsa chitsanzo chomwe mukufuna ku silicon wafer. Sitepe iyi imayala maziko otsatizana, kuyika ndi njira zina, kuwonetsetsa kuti microstructure yofunikira pa chip ikhoza kukopera molondola ku chowotcha cha silicon. Kusankhidwa ndi kugwiritsidwa ntchito kwa omangamanga kumakhudza kwambiri khalidwe ndi ntchito ya chip chomaliza, kotero kuti kugwiritsa ntchito omangamanga kuyenera kuyang'aniridwa mosamalitsa ndikukhazikika pakupanga mafakitale a semiconductor.