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Table ya Parameter

Mafotokozedwe Akatundu

Popanga mabwalo ophatikizika ndi mapanelo owonetsera, "stripper" nthawi zambiri amatanthauza wopanga omwe amagwiritsidwa ntchito kuchotsa mbali zosadziwika za photoresist. Njira zake zogwiritsira ntchito nthawi zambiri zimaphatikizapo:

Kukhudzika:Panthawi yopanga, photoresist imakutidwa pamwamba pa silicon wafer. Zomatirazo zimawululidwa ndi kuwala ndi mapangidwe apangidwe. Kupyolera mu ndondomeko ya photolithography, chitsanzocho chimasamutsidwa kwa photoresist.

Kukula:Mbali zosaonekera ziyenera kuchotsedwa. Mu sitepe iyi, wopanga (stripper) amagwiritsidwa ntchito kuchotsa photoresist m'malo osadziwika kuti apange chitsanzo chomwe akufuna.

Kuyeretsa:Tsukani chowotcha cha silicon ndikuchotsa zotsalira zilizonse zomwe zitha kukhala pamwamba. Pakupanga gulu lowonetsera, opanga omwewo atha kugwiritsidwanso ntchito kuchotsa zinthu zina kapena zinthu zina kuti apange mawonekedwe kapena mawonekedwe a gulu lowonetsera. Nthawi zonse, kugwiritsa ntchito wopanga kumafuna kutsata malangizo a wopanga ndi malangizo achitetezo kuti atsimikizire chitetezo cha ogwira ntchito komanso kugwiritsa ntchito moyenera zida zopangira.

Popanga chip, Stripper nthawi zambiri amatanthauza chojambula cha photoresist, chomwe chimagwiritsidwa ntchito kuchotsa photoresist. Photoresist ndi chinthu chofunikira kwambiri chomwe chimagwiritsidwa ntchito potengera mawonekedwe pakupanga chip. Mu ndondomeko ya photolithography, photoresist imakutidwa pamwamba pa chip, ndiyeno ndondomeko yofunikira imapangidwa kudzera muzitsulo monga kuwonekera ndi chitukuko. Komabe, kusamutsidwa kwachitsanzoko kukatha, photoresist yotsalira pa chip pamwamba iyenera kuchotsedwa kuti apitirize ndi sitepe yotsatira, monga etching kapena deposition. Panthawiyi, muyenera kugwiritsa ntchito Stripper kuchotsa photoresist. Stripper nthawi zambiri ndi mankhwala omwe amatha kusungunula mwachangu komanso moyenera ndikuchotsa photoresist popanda kuwononga chip pamwamba. Njira imeneyi ndi yofunika kwambiri pofuna kuonetsetsa kulondola ndi khalidwe la kupanga chip. Pambuyo photoresist ndi kuchotsedwa, Chip pamwamba amakhala woyera, kupereka woyera padziko wotsatira ndondomeko masitepe.