Umphuhlisi
Itheyibhile yeParameter
Indawo yesicelo | Ukuhlelwa | Igama lemveliso | Elinye iGama | Umgangatho weMveliso |
TFT-LCD | Uphuhliso | Umphuhlisi weCF | Uphuhliso lweCF | |
Umphuhlisi woluhlu | 25% TMAH | |||
Potassium Hydroxide | KOH | |||
I-Sodium Hydoxide | NAOH |
Ingcaciso yeMveliso
Kwisekethe edibeneyo kunye nokuveliswa kwephaneli yokubonisa, "uphuhliso" luhlala lubhekisela kwisinyathelo senkqubo ye-photolithography esetyenziselwa ukususa i-photoresist kwiindawo ezingabonakaliyo. Eli nyathelo libaluleke kakhulu kwinkqubo yokuvelisa kuba ichaza iphethini kunye nesakhiwo sezinto eziphathekayo, ezichaphazela ukusebenza kwesixhobo. Kwinkqubo ye-photolithography, isisombululo esiphuhlisayo sisetyenziselwa ukucubungula i-photoresist egubungela i-chip surface kwaye isuse i-photoresist kwiindawo ezingabonakaliyo.
Usetyenziso oluthile ludla ngokubandakanya la manyathelo alandelayo:
Ukulungiselela:Ngaphambi kokuphuhlisa, kufuneka ulungiselele izixhobo eziphuhlisayo kunye nokuphuhlisa isisombululo. Isisombululo esiphuhlisayo ngokuqhelekileyo sisisombululo esikhethekileyo samachiza esichitha ngokukhethayo i-photoresist kwiindawo ezingabonakaliyo.
Ukumanzisa:I-chip ehlanganiswe ne-photoresist ifakwe kwisisombululo esiphuhlisayo. Ixesha lokufunxa kunye nobushushu ngokuqhelekileyo kufuneka kulawulwe ukuqinisekisa ukuba i-photoresist isuswe ngokufanelekileyo.
Ukuhlamba:Emva kokuba uphuhliso lugqityiwe, i-chip idla ngokufuna ukuhlanjwa ukususa intsalela yesisombululo kunye nobunye ukungcola.
Ukomisa:Ekugqibeleni, i-chip kufuneka yomiswe ukuqinisekisa ukuba umphezulu wayo womile kwaye awunayo intsalela.
Kwimveliso yephaneli yomboniso, amanyathelo ophuhliso afanayo nawo anokusetyenziswa ukususa imathiriyeli ethile okanye iikhompawundi ukwenza iipatheni ezithile okanye izakhiwo zephaneli yokubonisa. Kuyafaneleka ukuba uqaphele ukuba inkqubo yophuhliso idinga ulawulo olungqongqo lweeparamitha zokucubungula kunye nexesha lokuqinisekisa ukuba iipatheni ezibangelwayo kunye nezakhiwo zihlangabezana neemfuno zoyilo kunye nokuchaneka kokuvelisa. Ukongezelela, kuyo nayiphi na inkqubo yokuvelisa, ukusetyenziswa kwezinto zeekhemikhali kufuna ukuthotyelwa kweenkqubo ezihambelanayo zokusebenza ezikhuselekileyo kunye neemfuno zokukhusela indalo.
Abaphuhlisi basetyenziswa kakhulu kwinkqubo ye-photolithography kwishishini le-semiconductor. Inkqubo ye-photolithography linyathelo eliphambili kwimveliso ye-semiconductor, esetyenziselwa ukuchaza iipateni ezincinci kunye nezakhiwo kwii-silicon wafers kwi-chip. Kwinkqubo ye-photolithography, i-photoresist igqunywe kumphezulu we-silicon wafer, kwaye ipateni idluliselwe kwi-photoresist ngokusebenzisa imaski kunye nokuvezwa kukukhanya kwe-UV. Emva koko, umphuhlisi ufika eqongeni. Umsebenzi womphuhlisi kukunyibilikisa okanye ukususa inxalenye yefotoresist engakhange yenziwe ifotolithographed, ngokwenza oko kudluliselwe ipateni efunekayo kwiwafer yesilicon. Eli nyathelo libeka isiseko se-etching elandelayo, i-deposition kunye nezinye iinkqubo, ukuqinisekisa ukuba i-microstructure efunekayo kwi-chip inokukopishwa ngokuchanekileyo kwi-silicon wafer. Ukukhethwa kunye nokusetyenziswa komphuhlisi kunempembelelo ebalulekileyo kumgangatho kunye nokusebenza kwe-chip yokugqibela, ngoko ke ukusetyenziswa komphuhlisi kufuneka kulawulwe ngokungqongqo kunye nokulinganisa kwimveliso yoshishino lwe-semiconductor.
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