Imichiza eyenziweyo
Itheyibhile yeParameter
Indawo yesicelo | Ukuhlelwa | Igama lemveliso |
NDIYABONA | Imichiza eyenziweyo | Isipili sibhityile kwicala elingasemva lewafa |
I-atomization kunye nokuncitshiswa kwe-wafer ngasemva | ||
Ukufakwa kwe-polysilicon kunye ne-silicon substrates | ||
Ukucoca i-oxide kunye nokucoca i-wafer | ||
Ukufakwa kwefilimu yesinyithi | ||
Nitrogen-silicon/oxy-silicon isokinetic etching | ||
Ukuchongwa okukhethiweyo kwe-indium gallium zinc oxide | ||
Ukuchongwa okukhethiweyo kwe-nitrogen-silicon/oxy-silicon | ||
I-SiN/AlO, ukhetho olukhethiweyo lwe-SiN/TiN | ||
I-Phosphoric acid additives, i-CMP abrasives | ||
Isizukulwana esitsha se-HK ye-etching fluids | ||
Ukukhutshwa kwe-molybdenum | ||
Etching of Sc-AlN-doped | ||
Ukuchongwa okukhethiweyo kweSiGe | ||
Icala elingasemva le-wafer lincitshisiwe kwaye i-silicon ene-doped kakhulu ikhethwa ngokukhethiweyo | ||
Kwi-etching, umlinganiselo wokukhetha we-silicon oxide ukuya kwi-silicon nitride etching ingaphezulu kwama-200 | ||
Kwi-etching, umlinganiselo wokukhetha we-silicon oxide ukuya kwi-aluminiyam ungaphezulu kwama-50 | ||
Ulwelo lwe-Etching lunokungena kwimisele enzulu ukuze ikhuphe imidiya ye-silica abayifake kubunzulu obuthile | ||
Isango lesilicon oxide linokufakwa kwaye linokufaniswa kakuhle | ||
I-Photoresist diluent | ||
Lawula ukuvuselelwa kwe-bezel wafer | ||
Ukususwa kwentsalela ye-etching eyomileyo | ||
Ukucocwa kwentsalela ye-etching eyomileyo kwinkqubo ye-aluminiyam (>130nm) | ||
Ukucocwa kwentsalela eyomileyo kwinkqubo yobhedu (130nm-40nm) | ||
Inkqubo yobhedu: ukucocwa kwentsalela eyomileyo ngeTiN imaski (40nm-12nm) | ||
Isetyenziselwa inkqubo ye-10nm yokucoca kunye nokususwa kwe-AlOx | ||
Ukususwa kwenkqubo yokunyusa ukukhanya | ||
Ukususwa kwenkqubo yokunyusa ukukhanya |
Ingcaciso yeMveliso
Iikhemikhali eziqulunqiweyo ziqhele ukusetyenziswa ngeendlela ezahlukeneyo ekwenzeni iisekethe ezidibeneyo kunye neepaneli zokubonisa. Olunye usetyenziso oluqhelekileyo lubandakanya:
Inkqubo yokufota:Iikhemikhali eziqulunqiweyo zingasetyenziselwa ukulungiselela i-photoresists ukuchaza izakhiwo ezintle kwiibhodi zeesekethe okanye iipaneli zokubonisa. Ezi khemikhali zidlala indima ephambili kwinkqubo ye-photolithography, inceda ukudala iipatheni ezichanekileyo kunye nezakhiwo.
Ukucoca kunye nokususwa kweNtsalela:Iikhemikhali ezenziweyo zisetyenziselwa iinkqubo zokuvelisa ukucoca kunye nokususa iintsalela, ezifana neentsalela ze-organic kunye ne-inorganic eziveliswa ngexesha lemveliso.
Ukusabela kweekhemikhali kunye nokubekwa:Amanye aMichiza aYilwayo anokusetyenziswa kwiintlobo ezahlukeneyo zeekhemikhali kunye neenkqubo zokubeka, ezifana nokulungisa iileya ezisebenzayo kunye ne-conductivity ethile okanye iimpawu ezibonakalayo.
Qinisekisa umgangatho wemveliso kunye nokungaguquguquki:Imichiza eyenziweyo ingasetyenziselwa ukuqinisekisa umgangatho wemveliso kunye nokuhambelana, umzekelo ngokulawula unyango oluphezulu kunye neemeko zenkqubo.
Xa usebenza kunye neMichiza eyakhiweyo, iinkqubo zokusebenza ezikhuselekileyo kufuneka zilandelwe ngokungqongqo kwaye ukuphathwa kunye nokulahlwa kufuneka kuqhutywe kwindawo efanelekileyo.
Kwinkqubo yokwenziwa kwecandelo lombane, iikhemikhali zodidi lwe-IC zihlala zinezi mfuno zilandelayo:
Ukucoceka okuphezulu:Iikhemikhali zodidi lwe-IC kufuneka zibe nobunyulu obuphezulu kakhulu ukuqinisekisa ukuba akukho kungcola okanye ungcoliseko olwaziswayo ngexesha lenkqubo yokuvelisa. Ezi khemikhali kufuneka ziveliswe ngokweemfuno ezingqongqo zococeko kwaye zilandele iinkqubo ezingqongqo zokucoca kunye novavanyo.
Iimpawu ezichanekileyo zeekhemikhali:Iikhemikhali ze-IC-grade kufuneka zibe neempawu zeekhemikhali ezizinzile, kwaye ukubunjwa kwazo kufuneka kulawulwe ngokungqongqo kwaye kuqinisekiswe ukuqinisekisa ukuba ziyahlangabezana neemfuno ngexesha lenkqubo yokuvelisa.
Ukuthobela imigangatho efanelekileyo:Ukuveliswa kunye nokusetyenziswa kweekhemikhali ze-IC-grade kufuneka zihambelane nemigangatho efanelekileyo yoshishino kunye nemimiselo yokuqinisekisa umgangatho wemveliso kunye nokhuseleko.
Xa usebenzisa iikhemikhali zeKlasi ye-IC, abavelisi balawula ngokungqongqo imithombo yabo, bamkele iindlela ezifanelekileyo zokugcina kunye nokuphatha, kwaye baqinisekise ukuba abaqhubi baqeqeshwe ngokufanelekileyo.
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