Stripper
Itheyibhile yeParameter
Indawo yesicelo | Ukuhlelwa | Igama lemveliso | Elinye iGama | Umgangatho weMveliso |
TFT-LCD | Stripper | Stripper | Stripper | |
I-Dimethyl Sulfoxide | I-DMSO | |||
I-Monoethanolamine | INTO |
Ingcaciso yeMveliso
Kwinkqubo yokuvelisa iisekethe ezidibeneyo kunye neepaneli zokubonisa, "i-stripper" ngokuqhelekileyo ibhekisela kumthuthukisi osetyenziselwa ukususa iindawo ezingabonakaliyo ze-photoresist. Amanyathelo okusetyenziswa kwawo ngokubanzi abandakanya:
Ukungakhuseleki:Ngexesha lenkqubo yokuvelisa, i-photoresist igqunywe kumphezulu we-silicon wafer. Umaleko wokuncamathelisa emva koko utyhileke ekukhanyeni ngepatheni yoyilo. Ngokusebenzisa inkqubo ye-photolithography, iphethini idluliselwa kwi-photoresist.
Uphuhliso:Amalungu angabonakaliyo kufuneka asuswe. Kule nyathelo, umphuhlisi (i-stripper) usetyenziselwa ukususa i-photoresist kwiindawo ezingabonakaliyo ukudala iphethini efunekayo.
Ukucoca:Coca i-wafer ye-silicon kwaye ususe nayiphi na intsalela yomphuhlisi enokuthi ihlale phezu komhlaba. Ngexesha lenkqubo yokwenziwa kwendawo yomboniso, abaphuhlisi abafanayo banokusetyenziselwa ukususa imathiriyeli ethile okanye iikhompawundi ukwenza iipateni ezithile okanye izakhiwo zephaneli yokubonisa. Kuzo zonke iimeko, ukusetyenziswa komphuhlisi kufuna ukuthotyelwa kwemiyalelo yomenzi kunye neengcebiso zokhuseleko ukuqinisekisa ukhuseleko lwabasebenzi kunye nokusetyenziswa okuchanekileyo kwezixhobo zokuvelisa.
Kwinkqubo yokuvelisa i-chip, i-Stripper idla ngokubhekisela kwi-photoresist stripper, esetyenziselwa ukususa i-photoresist. I-Photoresist yinto ephambili esetyenziselwa ukuhanjiswa kwepateni kwimveliso ye-chip. Kwinkqubo ye-photolithography, i-photoresist ifakwe kumphezulu we-chip, kwaye ke iphethini efunekayo yenziwe ngamanyathelo afana nokuvezwa kunye nophuhliso. Nangona kunjalo, xa ukuhanjiswa kwepateni kugqityiwe, i-photoresist eseleyo kumphezulu we-chip kufuneka isuswe ukuze kuqhutyekwe nenyathelo lenkqubo elandelayo, njengokurhweba okanye ukubekwa. Ngeli xesha, kufuneka usebenzise i-Stripper ukususa i-photoresist. I-Stripper idla ngokuba sisisombululo sekhemikhali esinokukhawuleza kwaye sichithe ngokukhawuleza kwaye sisuse i-photoresist ngaphandle kokonakalisa umphezulu we-chip. Le nkqubo ibalulekile ekuqinisekiseni ukuchaneka kunye nomgangatho wokwenziwa kweetshiphu. Emva kokuba i-photoresist isusiwe, umphezulu we-chip uba ucocekile, unikezela indawo ecocekileyo kumanyathelo enkqubo elandelayo.
inkcazelo2